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nav_pfeil_db Litho workshop I: Proximity effect and correction
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nav_pfeil_db Litho workshop II: Automation and wafer exposure
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nav_pfeil_db Litho workshop III: Customer applications
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nav_pfeil_db Litho workshop IV: Nanoengineering options
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Workshops

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Raith offers different workshops for those users and operators who have already gained some wider experience with Raith systems.

I: The purpose of this workshop is to establish a deeper understanding of the (PE) in electron beam lithography.
II: This workshop should enable the user to fully tap the automation potential of the Raith software suite. Additionally the user will learn how to handle wafers with the RAITH150 and e_LiNE series of tools.
III: This workshop addresses users performing advanced exposure tasks. Entering into questions of general lithography, software and design, exposures parameters or developing, it provides the user the opportunity to improve his application.
IV: The workshop gives users a general physical background of process technology and enables the user to gain first hand experience of the Raith nanoengineering options.
For further information on individual workshops, please follow the navigation on the left.
Signing up for a electron beam lithography workshop requires a completed registration form including workshop related questions.
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