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Lithography & nanoengineering

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Nanotech R&D requires versatile and flexible instruments. State of the art performances, multi user management, instrument reliability and ease of operation are the critical requirements. Automation is mandatory for small batch applications.

VOYAGER (TM) marks the birth of a new class of e-beam writer technology. With its innovative architecture and specifications, it has been designed for one purpose: accurate results, delivered at high speeds and reasonable costs.
RAITH150-TWO is Raith's highly automated E-beam writer for long-lasting and large area exposures. It ideally suits nanotechnology research centres and industry labs.
e_LiNE plus is a versatile electron beam lithography and nanoengineering workstation complying with the specific requirements of interdisciplinary research at universities.
PIONEER is the ideal hybrid for both high resolution electron beam lithography and imaging in university institutes.
ionLiNE is the first three-dimensional lithography system in the world. 2D EBL functionality has been extended to provide true 3D patterning capability.
traxx and periodixx enable zero lithography to write extended waveguide or repetitive photonic crystal style pattern without any stitching error.
TwinLITH - the new concept. Raith offers EBL and IBL systems, which can be, given the same hardware and software platform, effectively considered twin systems working simultaneously in parallel on complimentary nanofabrication tasks.

The Raith company offers innovative solutions for lithography and nanoengineering. Raith gained experience in the field of micro- and nanotechnology since more than 25 years. Raith would be happy to assist you with further information and consultation in questions of lithography and nanoengineering.
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E-beam writer technology_VOYAGER_pic0.jpg
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VOYAGER
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Electron beam lithography system_RAITH150-TWO_pic1.jpg
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RAITH150-TWO
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Electron beam lithography system_e_LiNE plus_pic1.jpg
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e_LiNE plus
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Electron beam lithography system_PIONEER_pic1.jpg
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PIONEER
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Ion Beam Lithography_ionLiNE_pic0.jpg
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ionLiNE
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