Lithography & nanoengineering
RAITH150-TWO
e_LiNE
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PIONEER
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SEM & FIB lithography kits
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Lithography & nanoengineering
RAITH150-TWO
RAITH150-TWO
...offers modern EBL system architecture AND its mini-environment renders infrastructure investments unnessecary .
...is the right choice for
Researchers and universities
Easy to learn and to use for all skill levels
Multi-user management supports concurrent access by multiple users with different privileges
Industrial and academic development groups
Professional-grade
GDSII
design files
Automated task lists
Device, wafer or mask level operation
Centralized nano and service centers
Multi-project wafer exposures
Fastest operation speed
Well-established support with professional support teams
...enables extensive applications
Ultra High Resolution (UHR) exposures
Mix-and-match with optical
lithography
Advanced device prototyping
High resolution template writing
Optical devices with zero
stitching
error
1/2
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RAITH150-TWO brochure
Zero stitching error using Fixed Beam Moving Stage (FBMS) mode
Multi-project wafer scale process for productive research and development
References
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RAITH150-TWO
5 nm lines exposed in HSQ resist
Stitching-free delay waveguide
Raith Micrograph Award 2010 - final stage
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Thailand
Turkey
USA
Vietnam
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