'Nanofabrication beyond electron beam lithography'e_LiNE plus is an ultra high resolution electron beam lithography system and multi-application nanoengineering workstation.With the e_LiNE plus, innovative research now has access to a modularly expandable research tool uniting the worlds of advanced electron beam lithography (EBL), nanoengineering, and ultra high resolution imaging & analysis. e_LiNE plus is the only EBL system which ideally combines the "classical workhorse" EBL with capabilities of a multi-application tool without compromising on state of the art lithography specifications The vision for advanced R&D required these additional in-situ functions, for applications such as direct electrical measurements, mechanical probing of nanostructures, and gas assisted deposition and etching processes. The new e_LiNE plus is the consequent evolution of the best selling e_LiNE with additional process techniques, functionality, accessories and improved specifications that meet the standard of today´s EBL requirements! FOR MORE INFO ON e_LiNE plus, please follow the links below!
What's new with e_LiNE plus? It's an extension of Raith's bestselling e_LiNE...
- plus improved EBL performance specs, now
- linewidth 10nm min. guaranteed
- minimum grating periodicity 40nm lines & spaces guaranteed
- plus improved max. patterning speed, now 20MHz
- plus new accessories, e.g.:
- Alternative single injection line gas delivery system for efficient FEBIP
- "Nanofinger" for profilometry
- Sample cooling/heating
- and more …
- plus new detector availability:
- inlens EsB and AsB detector for improved mark recognition and imaging with material contrast
- STEM detector for ultra high imaging resolution with dark field & bright field information
- plus new 3D process development and inspection module
- plus new acoustic design
- plus latest Raith NanoSuite Software
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e_LiNE plus - Nanofabrication beyond electron beam lithography |
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Ultra High Resolution: 9nm lines exposed in HSQ resist at 20 keV |
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Advanced EBL: Photonic crystal structure in membrane (underetched) - William Whelan-Curtin, University of St. Andrews, UK |
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4 nanomanipulator-driven tungsten tips under visual SEM-inspection mode control |
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Nanoprobing of freely suspended Pt-nanowire, deposited on gold contact pads with EBID |
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Star-like 3D-EBID test pattern, surface diffusion dominated growth due to regional precursor depletion |
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Manipulation of EBID nano structures |
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