SEM & FIB lithography kits

ELPHY MultiBeam delivers true lithographic performance on an analytical FIB-SEM instrument by combining the newest evolutions in multi technique nanofabrication and 3D Ion Beam Lithography (IBL) with the best Electron Beam Lithography (EBL) performance available for upgrades.

ELPHY Plus is the advanced solution typically chosen for Thermal FE SEM or FIB or SEM-FIB tools. The high performance hardware has the best electronic signal quality at high writing speeds.

ELPHY Quantum is the universal solution to add to your SEM or FIB. It fits to tighter budgets and no compromise is made to include the comprehensive Raith ELPHY software package.

Compact laser interferometer stage technology is uniquely offered by Raith, and helps to overcome the limitations of SEM lithography i.e. lack of capability and accurate positioning for multilevel applications.

Our high end lithography packages for your SEM and FIB lithography offer state of the art technical performance and stability even at high writing speeds. A team of more than 15 support engineers will train your staff and answer your support requests. If you have any questions, we would be happy to assist you with further information and consultation. Please feel free to contact us.