...offers modern EBL system architecture AND its mini-environment renders infrastructure investments unnessecary . ...is the right choice for Researchers and universities - Easy to learn and to use for all skill levels
- Multi-user management supports concurrent access by multiple users with different privileges
Industrial and academic development groups - Professional-grade design files
- Automated task lists
- Device, wafer or mask level operation
Centralized nano and service centers - Multi-project wafer exposures
- Fastest operation speed
- Well-established support with professional support teams
...enables extensive applications - Ultra High Resolution (UHR) exposures
- Mix-and-match with optical lithography
- Advanced device prototyping
- High resolution template writing
- Optical devices with zero error
|
next page
