ELPHY Quantum is the most widespread and universal lithography attachment for SEM & FIB.
All required functions are fully integrated into one software, from pattern design, exposure parameter management, pattern alignment to step and repeat exposures.
ELPHY Quantum hardware is a specifically designed 16 bit, 2.5 MHz DAC vector scan beam deflection PC board installed into a state of the art Windows computer. Raith´s world wide support infrastructure for installation and training at your site warrants that you will able to pattern and inspect results within the shortest possible time.
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