ELPHY Quantum

ELPHY software features

• Hierarchical fully integrated layout editor/viewer
• Data import for , and ASCII data
• Exposure parameter adjustment and calculation
• Macro generation and VB scripting
• Digital image acquisition
• Line width measurement capabilities
• SEM/FIB remote control and FIB module
• A second offline licence is included
• Optional: Fully integrated correction and parameter calculation

ELPHY Quantum hardware features

• Writing speed 6 MHz
• TTL - blanking signal output
• TTL - SEM/FIB external scan enable/disable
• TTL signal for FIB/SEM external beam control request
• 3 additional DAC per channel alignment and calibration ( hardware for scaling, rotation / orthogonality and shift)