Accurate stages

To comply with the demand of shrinking geometries, highest stage precision is essential.
Raith provides solutions for optical microscopes as well as laser interferometer controlled stages for
vacuum chambers of SEM, FIB or other analytical instruments.

Laser interferometer stages yield high absolute addressing accuracy and best repeatability. In
combination with ESCOSY Plus software Raith is able to provide a high accuracy navigation solution from one hand.

For optical microscopes Raith can provide stages from 2 to 12 inch.