Downloads: Scientific Poster
Sketch & Peel Method with Gold and Silicon Focused Ion Beams
The novel simplified and very fast technique called “sketch & peel” is presented with FIB employing Au and Si ion beams. When cutting only the outline of e.g. plasmonic features in a gold layer with intentionally bad adhesion, one can remove the large gold parts by scotch tape method. This work allows for patterning large areas in a very fast and still resistless way and is based on a collaboration with Hunan University.
The merging of cathodoluminescence spectroscopy and electron beam lithography for the innovative inspection and fabrication of optical devices is being discussed by studying nanodiamonds dropcasted on a silicon chip.