The purpose of this workshop is to establish a deeper understanding of the proximity effect (PE) in electron beam lithography.
The physical background of the effect is explained briefly, as well as methods to avoid the influence of the PE. Another focus is the usage of Raith software package for proximity effect correction.
After the workshop the participants should be able to estimate the impact of the PE to their application and know either how to circumvent the effect or how to correct the dose distribution of their pattern.
- General explanation of proximity effect in electron beam lithography (talk)
- Introduction to Raith proximity effect correction software (talk & off-line session)
- Correction of participants' GDSII designs (off-line session)
- Exposure of the participants` patterns and investigation of the results (practical session)
- Determination of proximity effect parameters (talk & practical session)
Raith head office in Dortmund, Germany
June 12th -13th, 2019
1,190.00 Euro total (incl. 19% VAT)
Cancellation policy: less than four calendar weeks prior to course 50% refund, less than one calendar week prior to course no refund.
Phone: +49 (0)231 / 95004 - 114
Your cancellation guarantee for trainings and workshops
Rebooking in favor of a substitute participant is possible anytime free of charge.
You can move your booking to another date or change it to a different course/workshop. Please notify us thereof in writing. A handwritten signature is not required. We charge the following processing fees:for rebookings (only possible once):
Rebooking up to 3 weeks before the start of the event: free of charge
Rebooking 3 - 1 weeks before the start of the event: 10% of course/workshop fee, plus VAT.
Rebooking from 1 week before the start of the event: 20% of course/workshop fee, plus VAT.
You may withdraw from the contract anytime. However, you must to do so in writing. A handwritten signature is not required. Please note that we charge the following processing fees for cancellations:
Cancellation up to 3 weeks before the start of the event: free of charge
Cancellation 3 - 1 weeks before the start of the event: 20% of course/workshop fee, plus VAT.
Cancellation from 1 week before the start of the event: the full course/workshop fee, plus VAT.
The full amount, plus VAT, is also charged in the event that a registered participant.does not show up for the course/workshop.