Photo of VOYAGER user Stanley Lin

Stanley Lin

VOYAGER at Stanford University

Photo of the electron beam lithography system VOYAGER
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Stanley Lin

VOYAGER at Stanford University

“As my colleague Rich Tiberio put it, “A one hundred hour installation, from loading dock to 50 kV SEM and initial e-beam calibration, could not have been possible without a very efficient design of the compact VOYAGER e-beam and the combined efforts of everyone involved.”

The VOYAGER’s unique capabilities including traxx, periodixx, intrinsic circles, 10 kV and 50 kV modes complement our existing nanofabrication offerings covering a broad base of research needs including low-kV 2D materials, photonics and waveguides. Moreover, Raith’s team of engineers are a great resource. Their remote access capability allows them to fix most issues effectively, increasing tool up-time.

As a nanofabrication user facility serving hundreds of researchers every year, the ease-of-use and intuitive software makes training new researchers simple and straightforward. New users undergo a 2-3 hour hands-on training session and are qualified to use the tool for basic writes.

Our facility is open to all academic, government and industry users. If anyone is interested in the VOYAGER’s capabilities, please visit our website http://snsf.stanford.edu/ for more information on how to become a user.”