High Performance Electron Beam Lithography

The electron beam lithography system for faster and better results

The VOYAGER is a dedicated high-performance electron beam lithography system suitable for industrial and academic environments where both throughput and precision matter. VOYAGER is based on Raith’s smart and innovative eWrite proprietary technology. Its system architecture has been designed from scratch specifically for those who are looking for fast sample turnover or small batch production by utilizing a reliable and economical workhorse. With features including

  • 50 kV thermal field emission column technology
  • fully automated write field calibration
  • automatic focus and stigmator setup
  • automatic switch between high-resolution and throughput writing mode
  • multi sample exposure automation
  • “printer-like” unique GUI for less experienced users: Job Creator and Job Manager
  • compact system footprint
  • innovative, upgradable and future-proof system architecture, and
  • attractive cost of ownership for a dedicated Electron Beam Lithography system,
With it’s innovative architecture VOYAGER allows for a cost-effective "through-the-wall-loading” setup of the e-beam writer

the VOYAGER stands for stable high performance and ease of use, all at an attractive price/performance ratio throughout the lifetime of the instrument. The VOYAGER electron beam lithography system comes with an environment-tolerant shield which ensures system stability even in less ideal laboratory environments.

Accurate results, delivered at high speeds and reasonable costs

The VOYAGER is the first system that incorporates the new Raith eWrite technology. eWrite combines new dedicated EBL electron optics with the latest innovations in pattern generator design that automates system calibrations and batch fabrication. All required corrections throughout the entire exposure job are applied pixel by pixel and “on the fly,” thus saving enormous process time overheads. Depending on the pattern, writing speeds of more than 1 cm²/h can be obtained at highest resolution.
The stitching-free exposure modes traxx and periodixx further enhance the possibilities of the electron beam lithography system for most recent communication technology or optoelectronic applications.
The compact footprint saves costly laboratory space. The possibility of a unique split room or “through-the-wall loading” setup even allows the system to be located outside precious cleanroom space.

Questions?

If you have any questions or need more information, just get in touch!

Features

Guaranteed line width

 ≤ 8 nm

Excellent beam current stability of

≤ +/- 0.2 %/h

Writing speed of more than

1 cm²/h 

A new high-performance electron beam lithography system with innovative architecture

Both hardware and software have been consistently designed for automated exposure operations. Unique software features such as the multi-sample exposure package allow users with little or no EBL experience to operate the system, an advantage that can leverage interdisciplinary research and sample exchange even between different university faculties or industrial departments. VOYAGER can handle small ~cm² samples up to 8-inch wafers (150 mm max. stage travel range).

Photo of three people working in the Raith Service and Support Center

Service

Specifications and system performance parameters are certainly drivers of decision-making where EBL systems are concerned. However, more factors need to be taken into consideration if efficient operation, continous uptime, and subsequent reliable support are to be ensured over the instrument system’s lifetime.

With a worldwide team of professional service engineers, Raith Service ensures you can make the best use of your system. When you decide on a Raith system, all site surveys together with environmental measurements, support with the resulting cleanroom laboratory setup, factory and on-site acceptances, and comprehensive on-site training are always included. Moreover, application support is available free of charge in all global time zones.

Raith service contracts follow a modular scheme and can be configured to match your individual requirements and budget. Visit our Service site or get in touch with us to learn more.

Service

Download VOYAGER brochure