Raith Service – With you all the way

Raith service offers the best support for electron beam lithography large area SEM and focused ion beam systems. Investment in a nanofabrication system involves consideration of more factors than specifications and system performance parameters to ensure efficient operation. Continuous uptime and solid support over the system’s lifetime are essential. By choosing a Raith nanolithography system, you gain access to Raith’s worldwide support and service infrastructure with its excellent application and system support hotline.

With more than 70 service specialists based in over 14 locations worldwide, you can be sure there is always a highly qualified and trained service engineer close to you. All service engineers are regularly trained at our headquarters, ensuring every service engineer meets consistent high training levels. Over 30,000 spare parts are in stock, distributed from 6 warehouses worldwide, so quick delivery is ensured should replacement of a critical part be necessary.

Is your system upgraded to Windows 10 yet? If not, get in touch and we will make sure keep your Raith System current and secure! Download the Flyer with all the relevant information here!

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Service Contracts

To make the most efficient use of your Raith system, we offer a service contract concept that is both beneficial and affordable. Furthermore, it is easily adaptable to your specific needs, so you can be sure you will get the best service for your individual requirements.

Service Contracts

Service Products

The Raith service team is dedicated to ensuring your ownership of a nanofabrication tool is efficient and successful. With a host of on-demand services such as

  • technical and application support,
  • site surveys,
  • system relocation service, and
  • consumable parts provision,

we are with you all the way. All service products can be included in a flexible service contract and are also available on demand.

Service Products

Training and Education

Outstanding results and efficient use are not a matter of luck! Qualified training and education that reflects the user’s skills and the required applications ensures that success is predictable.


A broad range of training options are available for EBL, FIB, and large area imaging. Find the course that best fits your needs.



Educational videos are available for Raith Users. Register to get access to our video library.

Photo of three people working in the Raith Service and Support Center

Service Contacts

We aim to build unique and effective partnerships with all customers, and offer a wide variety of services to support your work.
Our ongoing investments in service staff, training, spare parts stocks, and infrastructure deliver advantages for all Raith customers.
Get in touch with us and let us know what we can do for you!

Service Contacts

Have a look over the shoulder while our Engineers execute a VELION installation at WWU Münster


service specialists…


…based in 14 locations worldwide


hours or more of training for each service engineer per year


spare parts …


… in 6 warehouses


Parameters checked and adjusted during preventive maintenance

Download Service Brochure

Get more information about Raith Service and the modular service contracts. Download the Service brochure to find out more details about contract possibilities and different contract modules.