traxx - continuous writing without stitching errors using FBMS technology

traxx is a unique feature based on FBMS exposure technology with "zero-stitching-error" approach. traxx is exclusively available for Raith electron and ion beam lithography systems, no other vector scan EBL system provides this functionality. Unlike conventional stitching exposures, traxx capitalizes on sophisticated FBMS using unique continuous writing mode. The beam remains stationary while the stage underneath follows arbitrary shaped paths of the desired patterns. Patterns can be several millimeters to centimeters long, while maintaining lateral dimensions below 20nm up to micrometers with minimum line edge roughness. Using this unique continuous writing mode avoids ANY stitching error and can therefore improve the quality and transmission of photonic devices, such as (tapered) waveguide and X-ray optics. traxx is fully integrated into the Raith Nanosuite software and fully compatible with the built in GDSII data handling. traxx is available for VOYAGER, RAITH150 Two, eLINE Plus and ionLINE Plus. Please consult with Raith if you are interested in upgrading your existing instrument.

periodixx - periodic patterning without stitching errors using MBMS technology

periodixx is a new and unique exposure technology with "zero-stitching-error" approach. periodixx is exclusively available for Raith electron and ion beam lithography systems, no other vector scan EBL system provides this functionality. In order to meet the need for a fabrication technique enabling superior devices with periodic structures, Raith offers periodixx, a dedicated stitch-error-free patterning mode, which is unique among Gaussian, vector scanning EBL and IBL systems. This new feature is based on Raith's Modulated-Beam-Moving-Stage (MBMS) technology, which is complementing the existing traxx exposure mode, using Raith's well established Fixed-Beam-Moving-Stage (FBMS) technology. In MBMS exposure mode, the beam movement is defined such that the combination of repetitive patterning and synchronized continuous movement of the Laser Interferometer Stage results in stitch-free, strip-shaped periodic structures. FBMS on the contrary allows continuous writing of elongated paths like optical waveguides without stitching, where the width of the path is defined by a dynamic beam expansion. periodixx is fully integrated into the Raith Nanosuite software and fully compatible with the built in GDSII data handling. periodixx is available for VOYAGER, RAITH150 Two, eLINE Plus and ionLINE Plus. Please consult with Raith if you are interested in upgrading your existing instrument.

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